Advanced Scanning Electron Microscopy for Material Characterization

This book offers an update on the latest advanced scanning electron microscopy (SEM) technologies and introduces the various SEM observations and applications to nanotechnology and nanoscience. It describes the key developments in SEM, such as field-emission electron guns, varios lens designs for in-lens systems, and multi-detector configurations. These developments not only enable the acquisition of diverse information through multiple detectors but have also driven the evolution of analytical techniques utilizing X-rays and diffraction effects. The book is composed of two parts: basics and applications. The first reviews the fundamental physics necessary to understand the principles of advanced SEM, namely electron matter interaction, secondary electrons and their emission, instrumentation, specimen charging and contamination. The second part then provides practical insights, such as specimen preparation and typical observations and classification of the materials according to their physical characteristics, i.e. metals, semiconductors, insulators, and nanostructures. Covering the basic physics of practical applications, the book serves as an SEM user guide for a wide readership, ranging from beginners to developers.