BÜCHER VERSANDKOSTENFREI INNERHALB DEUTSCHLANDS
eBook
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Springer International Publishing
ISBN 978-3-319-76294-4
Standardpreis
Bibliografische Daten
eBook. PDF. Weiches DRM (Wasserzeichen)
2018
38 s/w-Abbildungen, 54 Farbabbildungen.
In englischer Sprache
Umfang: 138 S.
Verlag: Springer International Publishing
ISBN: 978-3-319-76294-4
Weiterführende bibliografische Daten
Das Werk ist Teil der Reihe: Chemistry and Materials Science Chemistry and Material Science (R0) NanoScience and Technology
Produktbeschreibung
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
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